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Micromachined optical fiber current sensor

机译:微机械光纤电流传感器

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摘要

We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 μm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometry with an optical fiber low-finesse Fabry–Perot microcavity. A measurement range of 0–70 A and a minimum detectable intensity of 20 mA were obtained when distance between the membrane and the electrical power line was 5 mm. The output signal directly shows a linear response with distance .
机译:我们描述了一种微加工的光纤电流传感器。传感元件由方形硅膜(长8 mm,厚20μm)组成,在其中心区域固定有圆柱形永磁体(NdFeB合金,直径3 mm,高1.5 mm)。这种结构允许永磁体在存在由交流电产生的磁场梯度的情况下振动。电流和磁体位移之间的线性关系是通过光纤微细法布里-珀罗微腔的白光干涉法测量的。当膜与电源线之间的距离为5 mm时,测量范围为0–70 A,最小可检测强度为20 mA。输出信号直接显示距离的线性响应。

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